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Shanghai Micro Electronics Equipment (SMEE) is China's state-owned lithography champion, the closest domestic analog to ASML, though generations behind on process capability. Placed on the US Entity List in December 2022, SMEE has since spun off its back-end packaging-lithography business into AMIES and its front-end DUV development into Huawei-linked Shanghai Yuliangsheng, which is now testing China's first domestic 28nm-class immersion DUV scanner at SMIC.

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SMEE

China's state-owned lithography champion, the closest domestic answer to ASML; its 600-series DUV scanner is in mass production at 90nm; spin-out Shanghai Yuliangsheng, linked to Huawei's SiCarrier initiative, is now testing China's first domestic 28nm-class immersion DUV scanner at SMIC

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China's state-owned lithography champion, the closest domestic answer to ASML; its 600-series DUV scanner is in mass production at 90nm; spin-out Shanghai Yuliangsheng, linked to Huawei's SiCarrier initiative, is now testing China's first domestic 28nm-class immersion DUV scanner at SMIC

Domestic leading-edge lithography capped at 90nm mass production; 28nm immersion DUV mass production targeted ~2027; sub-10nm not expected before 2030

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